Feb. 1. 2006

Olympus Launches U-UVF248 DUV Observation System for Microscopes - Newly Developed DUV Optical System Supports Ultra-High Resolutions up to 0.08µm -

External Appearance U-UVF248 with Semiconductor Inspection Microscope System MX61

Olympus Corporation (President: Tsuyoshi Kikukawa) is pleased to announce the U-UVF248, a deep ultraviolet (DUV)*1 microscope capable of 0.08µm line and space resolution.  The new microscope will go on sale on February 13, 2006.  This new product can be added as an option to an Olympus MX-Series semiconductor FPD inspection microscope to create an ultraviolet microscope system for a variety of observational uses, something that was previously only possible with specialized microscope systems.

The U-UVF248 microscope will be on display at Semicon Korea 2006, the Convention and Exhibition Center (COEX) commencing February 8 through 10 under the name of Techsan Community Corporation: Exhibition Hall Pacific Booth No.602 in Seoul.

Product Launch Date U-UVF248 DUV observation system March 1, 2006

*1  Deep ultraviolet: This term refers to ultraviolet rays with extremely short wavelengths, usually below 300nm.

Main Features

1.  The newly developed DUV optical system supports observation at ultra-high resolutions up to 0.08µm lines and spaces. 2.  The system can be added to an optical microscope. 3.  The system is very easy to operate and can be laid out as required.

Detailed Features

1.  Newly Developed DUV Optical System - Ultra-High Resolutions up to 0.08µm   The newly developed DUV optical system supports observation at ultra-high resolutions up to 0.08µm. This was achieved by developing a new optical system optimized for the deep ultraviolet region (248nm). The system maintains excellent contrast up to the limit of its resolution. Olympus has used a non-cemented lens"*2 to prevent lens performance from degrading under prolonged UV exposure. The newly developed DUV design technology and the simple optical system provide brighter, more detailed images than is possible with existing systems. *2  non-cemented lens: Olympus does not use bonding agents to join the lenses, which are advantage in trouble free for years with no impact in performance. 2.  Compatible with Optical Microscopes   Unlike existing DUV microscope systems, which require specially designed microscopes, the system can be added as an option to any Olympus semiconductor inspection microscope in the MX61 or MX51 Series. The system is also easily expandable, and the DUV camera can be controlled using image processing software. 3.  Versatile System Layouts for Optimal Ease of Use   The light source has been separated from the main unit and substantially reduced in size. This feature allows the system to be laid out as required for optimal ease of use. For stress-free specimen movement and focusing, the system can display images at 15 frames per second in real time.