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January 25,2007

Olympus Launches LEXT OLS3100 Confocal Laser Scanning Microscope
Greater simplicity with higher precision

This new system improves the efficiency of the 3D observation and metrology.
LEXT OLS3100 Confocal Laser Scanning Microscope
LEXT OLS3100 Confocal Laser Scanning Microscope
Olympus Corporation (President: Tsuyoshi Kikukawa) is pleased to announce the worldwide launch of the LEXT OLS3100 confocal laser scanning microscope on January 25, 2007. This new system allows significantly speedy observation and measurement of fine surface patterns on semiconductors, advanced materials and electronic devices. The LEXT OLS3000, which was introduced in January 2004, has earned an excellent reputation for its high resolution and versatile observation methods and has become an industrial-leading standard for laser microscopes. While maintaining the excellent performance of its predecessor, the LEXT OLS3100 is even revolutionarily easier to operate with a "single click" concept. Exclusive Olympus technology is also reflected in further improvements in reliability, including the highest standard of measurement repeatability (*) in the world. By introducing this new product, Olympus is helping to set a new standard of efficiency in R&D and Failure analysis for leading-edge products.
* Repeatability: The results obtained when the same specimen is measured over a short period of time by the same person using the same equipment
The LEXT OLS3100 will be exhibited at SEMICON Korea 2007, which will be held in Seoul between January 31 and February 2.
Launch Overview
Product Name Launch Date
LEXT OLS3100 Confocal
Laser Scanning Microscope
January 25, 2007
Main Features
1. Ideal 3D imaging achievable with a single click
2. Industrial-leading resolution and repeatability for extremely reliable measurement data
3. Ability to observe and analyze all types of specimens thanks to versatile observation methods and a variety of 3D image presentation patterns
Background to Launch
In recent years confocal laser scanning microscopes have played an increasingly important role as non-contact, non-destructive three-dimensional observation/metrology equipment in many industrial areas, including today's leading-edge semiconductors packaging as well as advanced materials and micro-electro-mechanical systems (MEMS). With the introduction of the LEXT OLS3000, Olympus created the new "LEXT" brand by combining the words "Laser" and "Next Generation."
Market growth in related industrial sectors is generating more needs for three-dimensional micro-metrology instruments Advances in technology over the past few years have meanwhile raised the standard of quality management required. Olympus has made the LEXT brand the focus of its efforts to meet these requirements by developing laser scanning microscopes that combine enhanced ease of use with improved visibility. The LEXT OLS3100 takes this concept of combining greater simplicity with improved performance to a new level. With this system, Olympus has succeeded in developing a laser scanning microscope that is simple enough for anyone to use yet capable of producing ideal results every time.
Details of Main Features
1. Ideal 3D imaging achievable with a single click
With other existing instruments, 3D image capturing first requires setting upper and lower import limits according to the height of the specimen. After importing the image, it is also necessary to carry out various adjustments to obtain ideal images. With the LEXT OLS3100, the operator simply clicks the "3D capture button." The system then automatically detects the height of the specimen and at the same time adjusts the brightness and contrast to obtain an ideal 3D image. Since no experienced operation is required to obtain a 3D image, even a first-time user can get results, minimizing measurement errors resulting from operator-related variations.
2. Industrial-leading resolution and repeatability for extremely reliable measurement data
A specially developed 408nm violet optical system maintains the industrial-leading horizontal resolution by minimizing the optical aberrations that tend to occur with short-wavelength light rays. Thanks to exclusive Olympus optical technology and improved software algorithms, the LEXT OLS3100 also has the superior height measurement repeatability. This new system represents a major step forward in the reliability of measuring systems.
3. Ability to observe and analyze all types of specimens thanks to versatile observation methods and a variety of 3D image presentation patterns
In addition to the brightfield and differential interference contrast (DIC) microscopy the LEXT OLS3100 is also equipped with two types of laser scanning microscope (LSM) contrast modes, namely standard confocal and confocal DIC to support a wide range of applications. The confocal DIC is comparable to observation with a scanning electron microscope (SEM). Once imported, images can be manipulated using a variety of 3D presentation patterns to provide the most effective visual output. They can also be rotated to any angle using a mouse.
Specifications for LEXT OLS3100
Laser Scan Universal
Observation method Laser Laser, Laser confocal DIC,
Brightfield, DIC
Microscope stand Illumination Laser 408nm LD laser
Class 2
White light - White LED illumination
Z stage Vertical
height of
Z revolving nosepiece Stroke 10mm
Resolution 0.01µm
Repeatability 3Ð=0.04+0.002Lµm
Objective lens 5x, 10x, 20x, 50x, 100x
Total magnification 120x~14400x
Field of view 2560x2560~21x21µm
Optical zoom 1x~6x
Stage Manual stage 100x100mm
Motorized stage 150x100mm
Frame memory Intensity 1024x1024x12bit
Height 1024x1024x16bit
AF Laser reflection type
Dimensions 464(W)x559(D)x620(H)mm
Weight 56.9kg 57.5kg
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